@article{Calligaris20144,
    title="MODELING OF ITO THIN FILMS UNDER ETCHING PROCESS BY USING X-RAY REFLECTIVITY",
    journal="Blucher Physics Proceedings",
    volume="1",
    number="3",
    pages="14 - 14",
    year="2015",
    note="",
    issn="23582359",
    doi="http://dx.doi.org/10.5151/phypro-sic100-014",
    url="www.proceedings.blucher.com.br/article-details/modeling-of-ito-thin-films-under-etching-process-by-using-x-ray-reflectivity-14365",
    author="G. A. Calligaris", "S. S. Mammana", "A. Greatti", "F. H. Luiz", "F. I. da Costa", "A.P. Mammana", "C. I. Z. Mammana", "D. den Engelsen", "L. P. Cardoso",
    keywords="",
}