G. A. Calligaris, S. S. Mammana, A. Greatti, F. H. Luiz, F. I. da Costa, A.P. Mammana, C. I. Z. Mammana, D. den Engelsen, L. P. Cardoso,
MODELING OF ITO THIN FILMS UNDER ETCHING PROCESS BY USING X-RAY REFLECTIVITY,
Blucher Physics Proceedings,
Volume 1,
2015,
Pages 14-14,
ISSN 23582359,
http://dx.doi.org/10.5151/phypro-sic100-014
(www.proceedings.blucher.com.br/article-details/modeling-of-ito-thin-films-under-etching-process-by-using-x-ray-reflectivity-14365)
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