Preparation Of C-axis-oriented YBa2Cu3O7-x Superconductive Films By Laser Chemical Vapor Deposition

Preparation Of C-axis-oriented YBa2Cu3O7-x Superconductive Films By Laser Chemical Vapor Deposition

Tu, Rong; Ke, Wang; Zhang, Song; Zhao, Pei; Goto, Takashi

Abstract:

YBa2Cu3O7-x (YBCO) superconductive films with c-axis orientation have been prepared by metal-organic chemical vapor deposition (MOCVD) since 1990s. However, the deposition rate of YBCO films by conventional MOCVD was too low to satisfy the requirement in industrial applications. We have developed a new laser CVD (LCVD) method to prepare many kinds of films and coatings with significant orientation at high deposition rate. In the present study, we have prepared YBCO films by LCVD with complete c-axis orientation at high deposition rates.

YBa2Cu3O7-x (YBCO) superconductive films with c-axis orientation have been prepared by metal-organic chemical vapor deposition (MOCVD) since 1990s. However, the deposition rate of YBCO films by conventional MOCVD was too low to satisfy the requirement in industrial applications. We have developed a new laser CVD (LCVD) method to prepare many kinds of films and coatings with significant orientation at high deposition rate. In the present study, we have prepared YBCO films by LCVD with complete c-axis orientation at high deposition rates.

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Tu, Rong; Ke, Wang; Zhang, Song; Zhao, Pei; Goto, Takashi; "Preparation Of C-axis-oriented YBa2Cu3O7-x Superconductive Films By Laser Chemical Vapor Deposition", p-42-42. In: Proceedings of the 13th International Symposium on Multiscale, Multifunctional and Functionally Graded Materials [=Blucher Material Science Proceedings, v.1, n.1]. São Paulo: Blucher, 2014.
ISSN 23589337, DOI